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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
silicon dioxide
anhydride, catalyst, glass, IV semiconductor, IV-VI semiconductor, mineral, oxide

Citation:
Chorasia A.R., Hood S.J., Chopra D.R.
J. Vac. Sci. Technol. A 14, 699
Pub Year:
1996

Data Processing:
Chemical Shift
CS-AP-1s,KL23L23(1D)

Measurement:
Anode Material:
other anode
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Au,Ag,Cu = 84.00,368.27,932.67
Charge Reference:
Element
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
~ 1000 A SiO2/Si. The sample was cleaned by Ar+ ion bombardment (Ep = 3 keV, j = 4 microamperes cm-2, time = 5 min). FAT mode.

Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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