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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
C2H4/Si
carbide state
ethylene/silicon
carbide, element, hydrocarbon

Citation:
Takagaki T., Igari Y., Takaoka T., Kusunoki I.
Appl. Surf. Sci. 92, 287
Pub Year:
1996

Data Processing:
Chemical Shift
other type of curve fit

Measurement:
Anode Material:
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Si2p3 = 99.34
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
C2H4 flux 2.7E15 molecules cm-2 s-1/Si(100) ) with a resistivity of 10 - 20 ohm cm (T = 1123 K, time = 30 min). The C/Si intensity ratio determined by XPS was 0.5. Branching ratio = 0.5.

Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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