NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

C₂H₄/Si

C₂H₄/Si*

ethylene/silicon

74-85-1

carbide, element, hydrocarbon

Citation:

Author Name(s):

Stinespring C.D., Wormhoudt J.C.

Journal:

J. Appl. Phys. 65, 1733

DOI:

Pub Year:

1989

bookAll Records in this Publication

Data Processing:

Photoelectron Line

2p_3/2

99.30

0.25

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

1.4E17, 1E18 and 4E19 C2H4 cm-2/Si(111). It was shown that these exposures correspond to ~0.5, ~1.0 ML and multilayer coverage, respectively.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300