Tab Page Summary
silicon nitride (SiN1.33)
IV-VI semiconductor, nitride
High Temperature Science 28, 137
Overall Energy Resolution (eV):
Calibration:
Au,Cu = 84.00,932.67
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
The amorphous SiNx alloys are obtained by means of the Dual Beam Sputtering technique.
Method of Determining Specimen Composition:
Electron-Probe Microanalysis, X-ray Photoelectron Spectroscopy
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300