NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:

Tab Page Summary

General:

SiOx/Si

Si*Ox/Si

silicon oxides/silicon

CAS Registry No:

11126-22-0

Class:

anhydride, element, IV-VI semiconductor, non-stoichiometric oxide, oxide

Citation:

Author Name(s):

Cardinaud C., Rhounna A., Turban G., Grolleau B.

Journal:

Revue Phys. Appl. 24, 309

DOI:

Pub Year:

1989

bookAll Records in this Publication

Data Processing:

Photoelectron Line

103.30

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

1.5

Gaussian Width (eV):

Lorentzian Width (eV):

Measurement:

Use of X-ray Monochromator:

Yes

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Other, Si2p = 99.34

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

Native oxide.

Specimen:

Method of Determining Specimen Composition:

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300