Tab Page Summary
    
    
    
        
            ammonium hexafluorophosphate
 
        
        
            ammonium, fluoride, phosphate
 
        
                Dake L.S., Baer D.R., Friedrich D.M.
 
            
                J. Vac. Sci. Technol. A 7, 1634
 
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            Overall Energy Resolution (eV):
                Calibration:
                Au,Cu    = 84.00,932.67
Charge Reference:
                Adventitious carbon
Energy Scale Evaluation:
                Reliable (reported energy within 300 eV of a reference energy)
Method of Determining Specimen Composition:
                Method of Determining Specimen Crystallinity:
                Specimen Temperature (K):
                 77