Tab Page Summary
    
    
    
        
        
        
            anhydride, catalyst, element, non-stoichiometric oxide, oxide
 
        
                Vasile M.J., Bachman B.J.
 
            
                J. Vac. Sci. Technol. A 7, 2992
 
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            
            Overall Energy Resolution (eV):
                Calibration:
                Au4f7    = 84.00
Charge Reference:
                Element
Energy Scale Evaluation:
                Reliable (reported energy within 300 eV of a reference energy)
Comment:
                Native oxide of 100 A aluminium film.
Method of Determining Specimen Composition:
                Method of Determining Specimen Crystallinity:
                Specimen Temperature (K):
                293