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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
(ZrO2)91(Y2O3)9/Si
metal state
zirconium dioxide diyttrium trioxide/silicon
double oxide, element, non-stoichiometric oxide, oxide

Citation:
Behner H., Wecker J., Matthee T., Samwer K.
Surf. Interface Anal. 18, 685
Pub Year:
1992

Data Processing:
Photoelectron Line

Measurement:
Anode Material:
Mg
X-ray Energy:
Overall Energy Resolution (eV):
0.9
Calibration:
Au4f7 = 84.00
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
10 A of yttria-stabilized zirconia were deposited onto p-type Si(100)-(2x1) with a resistivity of 1ohm cm at 1003 K. The substrate was cleaned by sputtering with a fast ion beam. The thickness was measured using a quartz-crystal thickness monitor.

Specimen:
Method of Determining Specimen Composition:
Rutherford Backscattering Spectrometry
Method of Determining Specimen Crystallinity:
Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction
Specimen Temperature (K):
300

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