NIST X-ray Photoelectron Spectroscopy Database

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Total Records: 6

Photoelectron Line

2p_3/2

454.92

data

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

0.7

Calibration:

Ag3d5 = 368.27

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

~ 1000 A TiN/~ 1000 A SiO2 thermally grown on p-type Si. The substrate temperature was maintained at 873 K. FAT mode.

Method of Determining Specimen Composition:

X-ray Photoelectron Spectroscopy

Method of Determining Specimen Crystallinity:

Specimen Temperature (K):

300