Tab Page Summary
Fix R., Gordon R.G., Hoffman D.M.
Overall Energy Resolution (eV):
Calibration:
Au4f7 = 84.00
Charge Reference:
Adventitious carbon
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
The sample was prepared by CVD at 378 K. The composition determined by RBS wasTaN1.7+-0.1. FAT mode.
Method of Determining Specimen Composition:
Rutherford Backscattering Spectrometry
Method of Determining Specimen Crystallinity:
X-ray Diffraction
Specimen Temperature (K):
300