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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

Details Summary:


Tab Page Summary

General:
Si/SiO2/Zr
silicon/silicon dioxide/zirconium
element

Citation:
Yamauchi T., Kitamura H., Wakai N., Zaima S., Koide Y., and Yasuda Y.
J. Vac. Sci. Technol. A 11, 2619
Pub Year:
1993

Data Processing:
Photoelectron Line

Measurement:
Anode Material:
Mg
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
FL = Fermi level
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable (reported energy within 300 eV of a reference energy)
Comment:
35 A Zr/5A SiO2/Si(100) annealed at 673 K for 40 min. The substrate was p-type The Si(100) wafer with a resistivity of 1 to 5 ohm cm.

Specimen:
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300

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