Tab Page Summary
titanium nitride/stainless steel
J. Vac. Sci. Technol. A 13, 2819
mixed Gaussian/Lorentzian
Overall Energy Resolution (eV):
0.75
Calibration:
Ag3d5, PdFL= 368.27, 0.0
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
The film thickness measured using a quartz-crystal thickness monitor was 14 nm. Peak locations: Doniach - Sunjic & Gaussian. FAT mode. Emission angle = 15 degrees.
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
300