Overall Energy Resolution (eV):
Calibration:
Au,Ag = 84.00,368.27
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
The composition determined by XPS was Ti0.5113N04887. The sample was cleaned by Ar+ ion bombardment (Ep = 3 keV, Ip = 4 microamperes, angle of incidence = 40 degrees). FAT mode. Emission angle = 45 degrees.
polycrystalline, sputtered, thin film
Method of Determining Specimen Composition:
X-ray Photoelectron Spectroscopy
Method of Determining Specimen Crystallinity:
X-ray Diffraction
Specimen Temperature (K):
293
