NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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Ge

Si₀.₂₉₇Ge₀.₁₁₅O₀.₅₈₈

silicon germanium oxide (Si0.297Ge0.115O0.588)

CAS Registry No:

double oxide, oxide

Author Name(s):

Kibel M.H., Leech P.W.

Surf. Interface Anal. 24, 605

Pub Year:

1996

book All Records in this Publication

Auger-Electron Line

Line Designation:

L₃M₄₅M₄₅(¹G)

Kinetic Energy (eV):

1137.20

Energy Uncertainty:

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

No

Anode Material:

Al

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Adventitious carbon

Energy Scale Evaluation:

Reliable (reported energy within 300 eV of a reference energy)

Comment:

The Ge-doped layers were formed by flame PECVD. The sample was cleaned by Ar+ ion bombardment (Ep = 5 keV, j =~ 2 microamperes cm-2, time = 2 min). FAT mode.

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