NIST X-ray Photoelectron Spectroscopy Database

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SiC

silicon carbide

409-21-2

carbide, II-VI semiconductor, IV semiconductor, IV-VI semiconductor, silicide

Chorasia A.R., Hood S.J., Chopra D.R.

J. Vac. Sci. Technol. A 14, 699

Pub Year:

1996

Chemical Shift

CS-AP-1s,KL23L23(1D)

0.10

0.2

data

Anode Material:

other anode

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au,Ag,Cu = 84.00,368.27,932.67

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with two-point correction of energy scale

Comment:

The sample was cleaned by Ar+ ion bombardment (Ep = 3 keV, j = 4 microamperes cm-2, time = 5 min). FAT mode. Cubic structure.