NIST X-ray Photoelectron Spectroscopy Database

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Si₃N₄

silicon(IV) nitride

12033-89-5

nitride, silicide

Chemical Shift

CS-AP-1s,KL23L23(1D)

1.90

0.2

data

Anode Material:

other anode

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au,Ag,Cu = 84.00,368.27,932.67

Charge Reference:

Element

Energy Scale Evaluation:

Reliable, with two-point correction of energy scale

Comment:

~ 2000 A Si3N4/Si. The sample was cleaned by Ar+ ion bombardment (Ep = 3 keV, j = 4 microamperes cm-2, time = 5 min). FAT mode.