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NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0
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General:
Citation
Data Processing:
Measurement:
Specimen:
Element:
Si
Formula:
SiCl
3
(C
2
H
5
)
Name:
trichloroethylsilane
CAS Registry No:
115-21-9
Class:
chloride, silane
Author Name(s):
Gray R.C., Carver J.C., Hercules D.M.
Journal:
J. Electron Spectrosc. Relat. Phenom. 8, 343
DOI:
10.1016/0368-2048(76)80021-7
Pub Year:
1976
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Total Records:
20
Element
Atomic No
Formula
Spectral Line
Energy (eV)
Details
Si
14
[(C
2
H
5
)
2
SiCl
2
]
2p
3/2
102.10
Si
14
(C
6
H
5
)
3
SiOSi(C
6
H
5
)
3
2p
3/2
101.30
Si
14
(CH
3
)
3
Si(CH
2
Cl)
2p
3/2
101.00
Si
14
SiF(C
2
H
5
)
3
2p
3/2
101.80
Si
14
Si(CH
3
)
4
2p
3/2
100.50
Si
14
Si(CH
2
CH)
4
2p
3/2
100.70
Si
14
SiBr(C
2
H
5
)
3
2p
3/2
101.00
Si
14
SiCl(C
2
H
5
)
3
2p
3/2
101.40
Si
14
[Si(CH
3
)(CH
3
COO)
3
]
2p
3/2
102.40
Si
14
Si(CH
2
CHCH
2
O)
4
2p
3/2
102.40
Si
14
(CH
3
)
3
SiOSi(CH
3
)
3
2p
3/2
100.90
Si
14
(CH
3
)
3
SiSi(CH
3
)
3
2p
3/2
100.50
Si
14
[Si(C
6
H
5
)
4
]
2p
3/2
101.20
Si
14
(CH
3
)
3
SiNHSi(CH
3
)
3
2p
3/2
100.80
Si
14
SiH(C
2
H
5
)
3
2p
3/2
100.70
Si
14
Si(C
2
H
5
)
3
OH
2p
3/2
101.10
Si
14
SiH(OC
2
H
5
)
3
2p
3/2
102.00
Si
14
(C
6
H
5
)
3
SiSi(C
6
H
5
)
3
2p
3/2
100.70
Si
14
[SiO(CH
3
)
2
]
5
2p
3/2
101.60
Si
14
SiCl
3
(C
2
H
5
)
2p
3/2
102.90
Data Type:
Photoelectron Line
Line Designation:
2p
3/2
Binding Energy (eV):
102.90
Energy Uncertainty:
Background Subtraction Method:
Peak Location Method:
Full Width at Half-maximum Intensity (eV):
Gaussian Width (eV):
Lorentzian Width (eV):
Use of X-ray Monochromator:
No
Anode Material:
X-ray Energy:
Overall Energy Resolution (eV):
Calibration:
Charge Reference:
Internal hydrocarbon
Energy Scale Evaluation:
Reliable, with two-point correction of energy scale
Comment:
Specimen:
vapor deposited
Method of Determining Specimen Composition:
Method of Determining Specimen Crystallinity:
Specimen Temperature (K):
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