NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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O

Al₃N₅O₃Si₃

silicon nitride aluminum oxide aluminum nitride ss(Al3N5O3Si3)

CAS Registry No:

nitride, oxide, solid solution

Photoelectron Line

Line Designation:

1s

Binding Energy (eV):

531.80

Energy Uncertainty:

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

2.6

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

No

Anode Material:

Mg

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Charge Reference:

Argon

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

The sialon was obtained by hot-pressing mixtures in the system Si3N4 and Al2O3.AlN at 2073 K for 1 h at a pressure of 20 MPa under 1 atm N2. The sample was cleaned by Ar+ ion bombardment (Ep = 400 eV, time = 200 s). No Ar+ ion-induced damage to the sample

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