NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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Si

SiH₀.₀₂

silicon hydride (SiH0.02)

CAS Registry No:

alloy, hydride

Photoelectron Line

Line Designation:

2p_3/2

Binding Energy (eV):

98.90

Energy Uncertainty:

0.1

Background Subtraction Method:

Peak Location Method:

data

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

No

Anode Material:

Al

X-ray Energy:

Overall Energy Resolution (eV):

Calibration:

Au4f7 = 84.00

Charge Reference:

Adventitious carbon

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

The samples were prepared by planar rf reactive magnetron sputtering at substrate temperature of 300 K. The sample consists of high-density regions of 50-200 A lateral dimensions separated by a low-density network.

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