NIST X-ray Photoelectron Spectroscopy Database

NIST X-ray Photoelectron Spectroscopy Database (SRD 20), Version 5.0

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Zr

(ZrO₂)₉₁(Y₂O₃)₉/Si

oxide state

zirconium dioxide diyttrium trioxide/silicon

CAS Registry No:

double oxide, element, non-stoichiometric oxide, oxide

Photoelectron Line

Line Designation:

3d_5/2

Binding Energy (eV):

182.90

Energy Uncertainty:

Background Subtraction Method:

Linear

Peak Location Method:

Gaussian

Full Width at Half-maximum Intensity (eV):

Gaussian Width (eV):

Lorentzian Width (eV):

Use of X-ray Monochromator:

No

Anode Material:

Mg

X-ray Energy:

Overall Energy Resolution (eV):

0.9

Calibration:

Au4f7 = 84.00

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

10 A of yttria-stabilized zirconia were deposited onto p-type Si(100)-(2x1) with a resistivity of 1ohm cm at 1003 K. The substrate was cleaned by sputtering with a fast ion beam. The thickness was measured using a quartz-crystal thickness monitor.

crystal, thin layer, vapor deposited

Method of Determining Specimen Composition:

Rutherford Backscattering Spectrometry

Method of Determining Specimen Crystallinity:

Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction

Specimen Temperature (K):

300

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