NIST X-ray Photoelectron Spectroscopy Database

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Y/SiO₂/Si

Y/SiO₂/Si*

yttrium/silicon dioxide/silicon

element, non-stoichiometric oxide

Photoelectron Line

99.40

Linear

Gaussian

Anode Material:

X-ray Energy:

Overall Energy Resolution (eV):

0.9

Calibration:

Au4f7 = 84.00

Charge Reference:

Conductor

Energy Scale Evaluation:

Reliable, with one-point correction of energy scale

Comment:

10 A of yttrium were deposited onto 17 A SiO2/Si(100) at 1003 K. The thickness was measured using a quartz-crystal thickness monitor.

multilayer structure, native oxide, vapor deposited, wafer

Method of Determining Specimen Composition:

Rutherford Backscattering Spectrometry

Method of Determining Specimen Crystallinity:

Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction

Specimen Temperature (K):

300