Overall Energy Resolution (eV):
0.9
Calibration:
Au4f7 = 84.00
Charge Reference:
Conductor
Energy Scale Evaluation:
Reliable, with one-point correction of energy scale
Comment:
10 A of yttria-stabilized zirconia were deposited onto p-type Si(100)-(2x1) with a resistivity of 1ohm cm at 1003 K and at 3E-6, 1E-7 and 5E-7 mbar of O2. The substrate was cleaned by sputtering with a fast ion beam. The thickness was measured using a quartz-crystal thickness monitor.
thin layer, vapor deposited, wafer
Method of Determining Specimen Composition:
Rutherford Backscattering Spectrometry
Method of Determining Specimen Crystallinity:
Low-energy Electron Diffraction, Reflection High-Energy Electron Diffraction
Specimen Temperature (K):
300
